A new method of thin-film thickness measurement using radioisotope Auger electrons
- 15 October 1974
- journal article
- Published by Elsevier in Nuclear Instruments and Methods
- Vol. 121 (2) , 253-258
- https://doi.org/10.1016/0029-554x(74)90073-1
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Alpha particle thickness gauge using a solid state detectorNuclear Instruments and Methods, 1961
- Range of 1-10 kev Electrons in SolidsPhysical Review B, 1960
- Measurement of surface density of thin foilsNuclear Instruments and Methods, 1959