Flexible, dry-released process for aluminum electrostatic actuators
- 1 January 1994
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in Journal of Microelectromechanical Systems
- Vol. 3 (3) , 90-96
- https://doi.org/10.1109/84.311558
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
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