Time-of-Flight Method of Determining Velocities of Sputtered Atoms
- 1 April 1963
- journal article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 34 (4) , 425-429
- https://doi.org/10.1063/1.1718387
Abstract
A method is described whereby velocities of sputtered atoms are determined by pulsing a target and measuring the transit time of sputtered atoms. The method permits determination of the distribution of velocities of sputtered atoms. The target pulse generator and the problems involved in pulsing a target are discussed. The photon-counting system used for determining transit times is described and a typical set of data is presented.Keywords
This publication has 5 references indexed in Scilit:
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