X-Ray Diffractometer Attachment for Direct Observation of Evaporated Thin Films

Abstract
An ultra‐high vacuum apparatus in which materials can be evaporated onto substrates at various temperatures has been developed. Without breaking the vacuum, x‐ray diffraction observations can be made over the angular 2θ range normally used on an x‐ray diffractometer. Continuous pumping during evaporation, anneal, and measurement is obtained by use of an ion pump.

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