Evaluation of surface damage on GaAs etched with an electron cyclotron resonance source

• 1 November 1994
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 12  (6) , 3382-3387
• https://doi.org/10.1116/1.587517

Abstract

Keywords

• RESONANCE SOURCE
• ELECTRON CYCLOTRON
• GAAS ETCHED
• CYCLOTRON RESONANCE
• SURFACE DAMAGE
• DAMAGE ON GAAS