Metal-Catalyzed Addition Polymers for 157 nm Resist Applications. Synthesis and Polymerization of Partially Fluorinated, Ester-Functionalized Tricyclo[4.2.1.02,5]non-7-enes
- 11 February 2003
- journal article
- research article
- Published by American Chemical Society (ACS) in Macromolecules
- Vol. 36 (5) , 1534-1542
- https://doi.org/10.1021/ma021131i
Abstract
No abstract availableKeywords
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