Optical detection of multibit logic signals at internal nodes in a flip-chip mounted silicon static random-access memory integrated circuit
- 1 November 1992
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 10 (6) , 3109-3111
- https://doi.org/10.1116/1.585938
Abstract
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