Polymer stamps for nanoimprinting
- 31 July 2002
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 61-62, 393-398
- https://doi.org/10.1016/s0167-9317(02)00577-4
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Large-area nanoimprint fabrication of sub-100-nm interdigitated metal arraysPublished by SPIE-Intl Soc Optical Eng ,2000
- Nano-compact disks with 400 Gbit/in2 storage density fabricated using nanoimprint lithography and read with proximal probeApplied Physics Letters, 1997
- The structure of branched polymers of diallyl phthalateJournal of Polymer Science, 1953