Subnanometre precision closed-loop positioning for optics and X-Y stage control using capacitance displacement sensors and piezo-electric actuators
- 1 February 1993
- proceedings article
- Published by SPIE-Intl Soc Optical Eng
- Vol. 2088, 150-160
- https://doi.org/10.1117/12.168064
Abstract
A closed-loop positioning system is described which is capable of sub-nanometer precision over displacements of up to 100 micrometers. The technique utilizes piezo-electric or electrostrictive translators in conjunction with capacitance displacement sensors. It has been applied in optical interferometry for path length control to picometer precision, and in X-Y stages developed for scanning probe microscopy.Keywords
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