Carrier Traps in Poly-p-Xylylene Films
- 1 June 1980
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 19 (6) , 1073-1075
- https://doi.org/10.1143/jjap.19.1073
Abstract
The X-ray induced TSC and TL and the dielectric loss of the vapour-deposited poly-p-xylylene (PPX) film have been studied. The TSC in a PPX film with a prior X-ray irradiation showed five peaks, designated C1 to C5 and they were due to trapped carriers introduced by the X-ray irradiation. The C2 and C5 peaks corresponded to the dielectric loss peaks, the γ and β relaxations, suggesting the carrier detrapping assisted by the release of molecular motions. The C1 peak suggested the existence of a new relaxation around 120 K. There were no relaxations corresponding to the C3 and C4 peaks and carriers were considered to be thermally released from traps whose depths were 0.5–0.6 eV.Keywords
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