Application of an Energy Selective Detector to the Sputtering Analysis of Solids
- 1 September 1971
- journal article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 42 (9) , 1353-1355
- https://doi.org/10.1063/1.1685384
Abstract
An ion probe facility is described. A single stage magnetic mass spectrometer coupled to an energy selective ion detector has been used to analyze sputtered ions. Energy selective operation is demonstrated for the analysis of a stainless steel sample.Keywords
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