Application of highly oriented, planar diamond (HOD) films of high mechanical strength in sensor technologies
- 30 June 1998
- journal article
- Published by Elsevier in Diamond and Related Materials
- Vol. 7 (6) , 779-782
- https://doi.org/10.1016/s0925-9635(97)00303-8
Abstract
No abstract availableThis publication has 5 references indexed in Scilit:
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- The nucleation of highly oriented diamond on silicon via an alternating current substrate biasApplied Physics Letters, 1996
- Electrical characterization of homoepitaxial diamond films doped with B, P, Li and Na during crystal growthDiamond and Related Materials, 1995
- Polycrystalline diamond pressure sensorJournal of Microelectromechanical Systems, 1995
- Piezoresistive effect of boron-doped diamond thin filmsDiamond and Related Materials, 1993