Properties of Amorphous Silicon Nitride Films

• 1 January 1966
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 113  (7) , 693
• https://doi.org/10.1149/1.2424093

Abstract

Keywords

• NITRIDE FILMS
• PROPERTIES OF AMORPHOUS
• AMORPHOUS SILICON NITRIDE