A nonevaporable low temperature activatable getter material

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Abstract
Nonevaporable getters have been widely used for many years in sealed vacuum or controlled atmosphere devices. They are also finding applications in other fields, where specific characteristics are required and tailor-made getters are requested, in some cases sacrificing speed in favor of lower activation temperatures, or lower operating temperature, while still maintaining an adequate sorption capacity. With these objectives, a decade long research project was undertaken which involved investigation of Zr–V–Fe alloys. The physico-chemical properties and the gettering characteristics (speed and capacity) of this family of alloys for some main gases usually present in vacuum devices (H2, CO, N2) have therefore been studied in a range of activation temperatures of less than about 700°C. The equilibrium pressure of H2 on these materials has also been studied as a function of concentration and temperature in a range of pressures less than ∠10 Pa. The results obtained, showing the efficiency of this type of alloy as a getter in a range of activation temperatures of about 500°C, are also discussed in comparison with some other well-known getter materials.

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