Polymeric Resists for X-Ray Lithography

• 1 January 1974
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 121  (11) , 1500
• https://doi.org/10.1149/1.2401718

Abstract

Keywords

• POLYMERIC RESISTS
• X RAY LITHOGRAPHY
• RESISTS FOR X RAY