Annealing effects on the properties of indium tin oxide films coated on soda lime glasses with a barrier layer of TiO2-SiO2 composite films

1 August 1997

journal article
Published by SPIE-Intl Soc Optical Eng in Optical Engineering

Vol. 36 (8) , 2335-2340
https://doi.org/10.1117/1.601461

Abstract

The structural, optical, and electrical properties of indium tin oxide (ITO) films coated on soda lime glasses with and without a barrier layer of TiO₂-SiO₂ composite films before and after annealing in air at 300 and 500 °C for 1 h have been systematically investigated using a x-ray diffractometer (XRD), spectrophotometer, and four-point probe, respectively. A TiO₂-SiO₂ barrier layer and an ITO layer were sequentially deposited onto unheated glass substrates by reactive ion-assisted electron-beam evaporation (IAD) using an advanced plasma source. Correlations between these properties and annealing temperatures and barrier-layer compositions are discussed. The suppression effect of a barrier layer on the outdiffusion of Na atoms from the soda lime glass substrate through the barrier layer into the ITO layer is investigated with secondary-ion mass spectrometry (SIMS). With respect to the optical and electrical requirements of ITO electrodes used in liquid crystal display (LCD) panels, ITO-coated soda lime glasses with a barrier layer of TiO₂-SiO₂ composite films with TiO₂2. © 1997 Society of Photo-Optical Instrumentation Engineers.

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