TiCxNy and TiCx-TiN films obtained by CVD in an ultrasonic field
- 1 June 1979
- journal article
- research article
- Published by Springer Nature in Journal of Materials Science
- Vol. 14 (6) , 1285-1290
- https://doi.org/10.1007/bf00549299
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
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- Growth and crystallographic features of titanium carbide whiskersJournal of Crystal Growth, 1974
- Phase Relationships in the Binary Systems of Nitrides and Carbides of Zirconium, Columbium, Titanium, and VanadiumJournal of the Electrochemical Society, 1950
- Über die binären Systeme des Titans mit den Elementen Stickstoff, Kohlenstoff, Bor und BerylliumZeitschrift für anorganische und allgemeine Chemie, 1949