A dynamic real time 3-D measurement technique for IC inspection

• 31 December 1986
• journal article
• Published by Elsevier in Microelectronic Engineering
• Vol. 5  (1-4) , 541-545
• https://doi.org/10.1016/0167-9317(86)90088-2

Abstract

Keywords

• DYNAMIC REAL-TIME 3-D MEASUREMENT
• IC INSPECTION
• REAL TIME