Formation of carbon nitride with sp3-bonded carbon in CNx/ZrN superlattice coatings

A carbon nitride phase with primarily ${\mathrm{sp}}^3$ -bonded carbon is stabilized in ${\mathrm{CN}}_x/\mathrm{ZrN}$ superlattice coatings. Rutherford backscattering spectrometry measurements give a N/C atomic ratio $\text{∼1.3}$ for the ${\mathrm{CN}}_x$ layers. High-resolution transmission electron microscopy and Z-contrast imaging from the superlattice show a well-defined layer structure. Raman and near-edge x-ray absorption fine structure spectroscopy results reveal the formation of ${\mathrm{sp}}^3$ -bonded carbon atoms in short-period ${\mathrm{CN}}_x/\mathrm{ZrN}$ superlattices.