Formation of alumina fine particles by a magnetron sputtering – gas aggregation method

• 1 March 1997
• journal article
• research article
• Published by Springer Nature in The European Physical Journal D
• Vol. 40  (1) , 115-118
• https://doi.org/10.1007/s004600050172

Abstract

Keywords

• 36.40.+D
• 07.77.+P