DC magnetron sputtered ITO films applied with indium tin oxide targets.

• 1 January 1987
• journal article
• Published by The Vacuum Society of Japan in SHINKU
• Vol. 30  (6) , 546-554
• https://doi.org/10.3131/jvsj.30.546

Abstract

Keywords

• INDIUM
• MAGNETRON SPUTTERED
• DC MAGNETRON
• SPUTTERED ITO
• ITO FILMS
• OXIDE TARGETS
• FILMS APPLIED