Thermomechanical modeling of an actuated micromirror
- 1 March 1995
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 47 (1-3) , 632-636
- https://doi.org/10.1016/0924-4247(94)00976-o
Abstract
No abstract availableThis publication has 1 reference indexed in Scilit:
- Thermal conductivity of CMOS materials for the optimization of microsensorsJournal of Micromechanics and Microengineering, 1993