Reduction of hydrogen induced losses in PECVD-SiO/sub x/N/sub y/ optical waveguides in the near infrared
- 30 October 1995
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- Vol. 2, 88-89
- https://doi.org/10.1109/leos.1995.484610
Abstract
The hydrogen in PECVD-SiO/sub x/N/sub y/ was studied with IR spectroscopy and ERD analysis as a function of the O/N ratio and the annealing treatment up to 1150/spl deg/C. The results were compared with measured spectral waveguide losses.Keywords
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