Metastable chlorine ion kinetics in inductively coupled plasmas
- 1 September 1997
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 15 (5) , 2698-2708
- https://doi.org/10.1116/1.580944
Abstract
No abstract availableThis publication has 38 references indexed in Scilit:
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