Preparation of PLZT Thin Films by RF Sputtering

• 1 June 1976
• journal article
• Published by IOP Publishing in Japanese Journal of Applied Physics
• Vol. 15  (6) , 1163-1164
• https://doi.org/10.1143/jjap.15.1163

Abstract

Keywords

• RF SPUTTERING
• PREPARATION
• PLZT THIN FILMS
• FILMS BY RF