Elastic stress domains on the Si(100) surface

• 1 July 1989
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B
• Vol. 7  (4) , 1013-1016
• https://doi.org/10.1116/1.584792

Abstract

Keywords

• ELASTIC STRESS DOMAINS
• SURFACE
• STRESS DOMAINS ON THE SI