Submicron stereolithography for the production of freely movable mechanisms by using single-photon polymerization
- 1 August 2002
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 100 (1) , 70-76
- https://doi.org/10.1016/s0924-4247(02)00043-2
Abstract
No abstract availableKeywords
This publication has 20 references indexed in Scilit:
- Real three dimensional micro fabrication using stereo lithography and metal moldingPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Photoforming applied to fine machiningPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Development of mass productive micro stereo lithography (Mass-IH process)Published by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Three-dimensional microfabrication by use of single-photon-absorbed polymerizationApplied Physics Letters, 2000
- Micro concentrator with opto-sense micro reactor for biochemical IC chip family. 3D composite structure and experimental verificationPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1999
- Surface micromachining for microelectromechanical systemsProceedings of the IEEE, 1998
- Two-photon-absorbed near-infrared photopolymerization for three-dimensional microfabricationJournal of Microelectromechanical Systems, 1998
- Three-dimensional microfabrication with two-photon-absorbed photopolymerizationOptics Letters, 1997
- Stereolithography and microtechniquesMicrosystem Technologies, 1996
- Microfabrication Techniques for Integrated Sensors and MicrosystemsScience, 1991