Ion projection lithography in (in)organic resist layers
- 31 December 1986
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 5 (1-4) , 193-200
- https://doi.org/10.1016/0167-9317(86)90047-x
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Microfabrication with ion beamsVacuum, 1985