First steps towards the fabrication of electrostatic micromotors using SOG
- 28 February 1995
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 46 (1-3) , 82-84
- https://doi.org/10.1016/0924-4247(94)00866-g
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Design of an integrated electrostatic stepper motor with axial fieldSensors and Actuators A: Physical, 1991
- MicrodyanmicsSensors and Actuators A: Physical, 1990
- IC-processed electrostatic micromotorsSensors and Actuators, 1989
- Design considerations for micromachined electric actuatorsSensors and Actuators, 1988
- Design considerations for a practical electrostatic micro-motorSensors and Actuators, 1987