Precision Goniometer for Fine Adjustment in the Nanoradian Range
- 1 July 1982
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 21 (7A) , L399
- https://doi.org/10.1143/jjap.21.l399
Abstract
A new type of goniometer for precise and smooth control in orientation of an object is designed and manufactured with several circular flexure hinges in a single block of material. The preformance of the new goniometer for fine adjustment and the stability against disturbing vibration of the base of building are experimentally checked, which has shown the feasibility of this type of goniometer for control in orientation as fine as several nanoradians.Keywords
This publication has 2 references indexed in Scilit:
- Piezodriven 50-μm range stage with subnanometer resolutionReview of Scientific Instruments, 1978
- Double-crystal, vacuum x-ray diffractometerReview of Scientific Instruments, 1977