Integrated magnetic field sensor
- 1 March 1991
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 26 (1-3) , 357-361
- https://doi.org/10.1016/0924-4247(91)87016-v
Abstract
No abstract availableKeywords
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- Noise in sensorsSensors and Actuators A: Physical, 1990
- Integrated silicon magnetic-field sensorsSensors and Actuators, 1986
- Silicon as a mechanical materialProceedings of the IEEE, 1982
- A graphical representation of the piezoresistance coefficients in siliconIEEE Transactions on Electron Devices, 1982