Contraction of Small Features in Hardened Thin Films of Novolak
- 1 November 1991
- journal article
- research article
- Published by Wiley in Berichte der Bunsengesellschaft für physikalische Chemie
- Vol. 95 (11) , 1546-1549
- https://doi.org/10.1002/bbpc.19910951145
Abstract
No abstract availableKeywords
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- Speed enhancement of PMMA resistJournal of Vacuum Science and Technology, 1979