Ion-Implantation Effects on Spin-on-Glass (Sol-Gel) SiO2 Films
- 1 January 1990
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Process Reliability Considerations of Planarization with Spin‐on‐GlassJournal of the Electrochemical Society, 1990