Surface charges induced by mechanical stresses in the silicon-silicon oxide interface
- 31 July 1971
- journal article
- research article
- Published by Elsevier in Solid-State Electronics
- Vol. 14 (7) , 639-641
- https://doi.org/10.1016/0038-1101(71)90139-0
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
- Stress at the Si—SiO2interface and its relationship to interface statesIEEE Transactions on Electron Devices, 1968
- RESIDUAL STRESSES AT AN OXIDE-SILICON INTERFACEApplied Physics Letters, 1967
- Measurement of Strains at Si-SiO2 InterfaceJournal of Applied Physics, 1966
- Measurement of Elastic Constants at Low Temperatures by Means of Ultrasonic Waves–Data for Silicon and Germanium Single Crystals, and for Fused SilicaJournal of Applied Physics, 1953