Reaction analysis for ZrO2 and Y2O3 thin film growth by low-pressure metalorganic chemical vapor deposition using β-diketonate complexes
- 1 January 1995
- journal article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 147 (1-2) , 130-146
- https://doi.org/10.1016/0022-0248(94)00623-7
Abstract
No abstract availableKeywords
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