Backscattered electrons from semiconductors and their effect on the resolution of TSEM
- 1 December 1973
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 44 (12) , 5301-5308
- https://doi.org/10.1063/1.1662147
Abstract
No abstract availableThis publication has 15 references indexed in Scilit:
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