Advanced CCD imager technology for use from 1 to 10 000 Å

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Abstract
We have developed a low‐noise, high‐sensitivity charge‐coupled‐device (CCD) technology for imaging applications extending from the soft x‐ray (1 Å) to the near‐infrared (10 000 Å) regimes. We have also developed a fabrication technology for making back‐illuminated versions of these devices with quantum efficiencies as high as 90% from 5000 to 7000 Å. Our efforts have focused on two devices, a 64×64 pixel back‐illuminated imager with two output ports that operates at 2000 frames per second with 23 electrons read noise, and a larger device, with 420×420 pixel format, designed for lower frame rates with noise as low as 1.5 electrons and used at visible, UV, and x‐ray wavelengths. Applications to plasma diagnostics include Thomson scattering and high‐frame‐rate imaging in the visible, as well as x‐ray imaging and bolometry.

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