Laser ablation-deposited PZT thin films for piezoelectric microsensors and microactuators
- 1 October 1995
- journal article
- Published by Taylor & Francis in Integrated Ferroelectrics
- Vol. 10 (1-4) , 89-98
- https://doi.org/10.1080/10584589508012267
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Ferroelectric La-Sr-Co-O/Pb-Zr-Ti-O/La-Sr-Co-O heterostructures on silicon via template growthApplied Physics Letters, 1993
- Microtransport induced by ultrasonic Lamb wavesApplied Physics Letters, 1991
- Surface outgrowth problem in c-axis oriented Y-Ba-Cu-O superconducting thin filmsApplied Physics Letters, 1991
- Applications of PZT and Related Thin Films in Piezoelectric MicrosensorsMRS Proceedings, 1991