Depth distributions of megaelectronvolt 14N implanted into various solids at elevated fluences
- 28 February 1989
- journal article
- Published by Elsevier in Materials Science and Engineering: B
- Vol. 2 (1-3) , 49-54
- https://doi.org/10.1016/0921-5107(89)90075-5
Abstract
No abstract availableKeywords
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