New test structures for on-chip absolute and accurate measurement of capacitances in a CMOS process

This publication has 4 references indexed in Scilit:

• Evaluations of leakage currents and capacitances on elementary CMOS devices
  Published by Institute of Electrical and Electronics Engineers (IEEE) ,2002
• Direct capacitance measurements of small geometry MOS transistors
  Microelectronics Journal, 1991
• A scaleable technique for the measurement of intrinsic MOS capacitance with atto-Farad resolution
  IEEE Transactions on Electron Devices, 1985
• Measurement of minimum-geometry MOS transistor capacitances
  IEEE Transactions on Electron Devices, 1985