Scanning tunneling microscope tip-induced anodization of titanium: Characterization of the modified surface and application to the metal resist process for nanolithography
- 1 September 1994
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 12 (5) , 2884-2888
- https://doi.org/10.1116/1.587208