Characterizing the absorption and aging behavior of DUV optical material by high-resolution excimer laser calorimetry

29 June 1998

proceedings article
Published by SPIE-Intl Soc Optical Eng

p. 1055-1061
https://doi.org/10.1117/12.310736

Abstract

Absorption loss in DUV optics during 193 nm irradiation is investigated by employing a high-resolution calorimetric technique which allows determining both single and two photon absorption coefficients at energy densities of several 10 mJ/cm², avoiding a significant thermal load on the samples. UV calorimetry is also employed to investigate laser induced aging phenomena, e.g. color center formation in fused silica or CaF₂. A separation of transient and cumulative effects as a function of intensity can be achieved, giving insight into various loss mechanisms. Moreover, the influence of dielectric coatings on the absorption characteristics is discussed.

Keywords

DEEP ULTRAVIOLET
EXCIMER LASERS
OPTICAL MATERIALS
ABSORPTION
CALORIMETRY
COLOR CENTERS
OPTICS
PHOTONS
SILICA
ULTRAVIOLET RADIATION
LASERS
OPTICAL COATINGS

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