c-BN films obtained by ionized deposition.

• 1 January 1985
• journal article
• Published by The Vacuum Society of Japan in SHINKU
• Vol. 28  (7) , 581-586
• https://doi.org/10.3131/jvsj.28.581

Abstract

Keywords

• IONIZED DEPOSITION
• BN FILMS OBTAINED
• OBTAINED BY IONIZED