1.75-GHz ACOUSTIC-SURFACE-WAVE TRANSDUCER FABRICATED BY AN ELECTRON BEAM
- 1 August 1969
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 15 (3) , 98-101
- https://doi.org/10.1063/1.1652923
Abstract
Surface‐acoustic‐wave interdigital transducers operating at 1.75 GHz have been fabricated on y‐cut z‐oriented LiNbO3 and y‐cut x‐oriented quartz substrates by electron‐beam techniques. The transducers consist of 25 pairs of interleaved aluminum ``fingers'' 0.3 μ wide and 0.7 μ apart. Used as a surface acoustic wave delay line, the insertion loss has been measured to be as low as 25 dB with a bandwidth of 70 MHz for 2.2‐μsec delay. The parameters of the equivalent circuit of the transducer have been measured and agree with the theoretical calculation.Keywords
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