Differential amplitude scanning optical microscope computer aided for linewidth measurements

10 November 1992

journal article
Published by Optica Publishing Group in Applied Optics

Vol. 31 (32) , 6836-6839
https://doi.org/10.1364/ao.31.006836

Abstract

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Keywords

OPTICS
PHOTONICS
LASER
OPTICAL
FIBER OPTICS
SPECTROCOPY
MEDICAL IMAGING
TELECOMMUNICATIONS
LIGHT
SOCIETY
SCIENCE
RESEARCH
PROCEEDINGS
JOURNALS
PUBLICATIONS
INTERNATIONAL

This publication has 3 references indexed in Scilit:

Differential confocal scanning microscope with a two-mode optical fiber
Applied Optics, 1992
Common path differential intensity and phase profilometer using time division multiplexing
Electronics Letters, 1991
Differential amplitude scanning optical microscope: theory and applications
Applied Optics, 1988