Low-threshold and high-temperature operation of 1.55-μm self-aligned ridge-waveguide multiple-quantum-well lasers grown by chemical-beam epitaxy
- 23 December 1991
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 59 (26) , 3381-3383
- https://doi.org/10.1063/1.105681
Abstract
We describe a low-threshold, low-internal-loss, multiple-quantum-well ridge waveguide laser operating at 1.55-μm wavelength and grown by chemical-beam epitaxy. With a high-reflection coating applied to one facet, it can operate CW to 100 °C. The laser exhibits single transverse-mode output and 6-GHz bandwidth. Processing utilizes a combination of self-aligned reactive-ion etching and wet chemical etching. Nearly 100% threshold and quantum efficiency yield of devices in bar form was obtained as a result of the excellent material uniformity, precision process control, and process uniformity over the wafer. This suggests that the present laser may be a potential candidate for low-cost light source applications.Keywords
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