Ion Induced Auger Electron Emission from Al-Mg Alloy under Low Energy Argon Ion Bombardment

Abstract
Ion induced Auger electron emission was investigated by measuring the polar angular distribution for the bulk-like shoulder in the Auger spectrum obeys the cosine law whilst that of the atomic-like peaks shows a spherical distribution, suggesting a model that the former Auger electrons are generated inside the sample and the latter from the sputtered atoms. This model was examined for Al-Mg alloy which showed the surface enrichment of Al. This surface enrichment clearly appears in the ion induced Auger spectrum.