Summary Abstract: Properties of TiN thin films on several substrate plates with a high current ion mixing machine
- 1 July 1987
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 5 (4) , 2191-2193
- https://doi.org/10.1116/1.574952
Abstract
No abstract availableKeywords
This publication has 0 references indexed in Scilit: