Selected Area Deposition of Single Crystal Silicon on Amorphous Quartz

• 1 January 1966
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 113  (10) , 1091
• https://doi.org/10.1149/1.2423763

Abstract

Keywords

• SELECTED AREA
• AREA DEPOSITION
• AMORPHOUS QUARTZ
• CRYSTAL SILICON
• SINGLE CRYSTAL