Measurement of semiconductor heterojunction band discontinuities by x-ray photoemission spectroscopy

1 May 1985

journal article
Published by American Vacuum Society in Journal of Vacuum Science & Technology A

Vol. 3 (3) , 835-841
https://doi.org/10.1116/1.573326

Abstract

Accurate knowledge of the band discontinuities at a heterojunction interface and the factors that affect their magnitude are of both fundamental and practical interest. The application of x-ray photoemission spectroscopy (XPS) to the direct, contactless, and quantitative measurement of the valence band discontinuity (ΔEv) at abrupt heterojunctions is discussed. The topics covered include a description of a method to achieve precise measurement, results of ΔEv measurements for many heterojunction pairs selected from the lattice-matched semiconductor series Ge, GaAs, ZnSe, CuBr, and AlAs, and a comparison of experiment to models that predict ΔEv. Examples are given to illustrate the effect on ΔEv of such preparation-dependent parameters as growth sequence and interface crystallographic orientation.

Keywords

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